All-In-One 系列探针为所有形貌测量模式提供四个具有不同几何形状的悬臂:接触模式、力调制、轻敲和敲击模式。
All-In-One技术数据: | ||||||||
Cantilever A | Cantilever B | Cantilever C | Cantilever D | |||||
Application | Contact Mode | Force modulation, Pulsed Force Mode | Soft Tapping Mode, Intermittent Contact-Mode | Tapping Mode, Intermittent Contact-Mode | ||||
Values | Range | Values | Range | Values | Range | Values | Range | |
Resonant Frequency | 15 kHz | +/-5 kHz | 80 kHz | +/-30 kHz | 150 kHz | +/-80 kHz | 350 kHz | +/-150 kHz |
Force Constant | 0.2 N/m | 0.04 - 0.7 N/m | 2.7 N/m | 0.4 - 10 N/m | 7.4 N/m | 1 - 29 N/m | 40 N/m | 7 - 160 N/m |
Resonant Frequency and Force Constant Similar to | Contact | Multi75 | Tap150-G | Tap300 | ||||
Cantilever Length | 500µm | +/-10µm | 210µm | +/-10µm | 150µm | +/-10µm | 100µm | +/-10µm |
Mean Width | 30µm | +/-5µm | 30µm | +/-5µm | 30µm | +/-5µm | 50µm | +/-5µm |
Thickness | 2.7µm | +/-1µm | 2.7µm | +/-1µm | 2.7µm | +/-1µm | 2.7µm | +/-1µm |
Tip Height | 17µm | +/-2µm | 17µm | +/-2µm | 17µm | +/-2µm | 17µm | +/-2µm |
Tip Set Back | 15µm | +/-5µm | 15µm | +/-5µm | 15µm | +/-5µm | 15µm | +/-5µm |
Tip Radius | < 10nm | |||||||
Coating | None or Aluminum Reflex | |||||||
Half Cone Angle | 20° - 25° along cantilever axis, 25° - 30° from side, 10° at the apex |
硅探针无涂层:All-In-One
硅探针30nm铝涂层:All-In-One-AL
硅探针镀30nm导电涂层:All-In-One-E
硅探针,尖端侧15nm类金刚石涂层,探测器侧30nm铝涂层:All-In-One-DLC