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各品牌离子溅射仪靶材尺寸表

发布日期:2022年12月28日    浏览次数:1015

QQ图片20221228105144

环形溅射靶选型表


品牌

型号

尺寸

Anatech / Technics

Hummer V / VI / 6.2 / 8

3” O.D. X 2” I.D

Polaron / Biorad

E5100 / E5150 / E5175 / SC510 / SC515

82mm O.D. X 60mm I.D

Polaron / Quorum

SC7640 / SC7680

82mm O.D. X 60mm I.D

Polaron 镀膜仪也以 Bio-Rad、Fisons、VG Microtech、Thermo VG、Emscope 和 Quorum 品牌出售。


圆形溅射靶选型表


品牌

型号

尺寸

Agar

Manual / Automatic

Ø57mm

Agar

High resolution sputter coater

Ø57mm

Anatech/Technics

Hummer I / II / III / Jr

Ø50mm

Bal-Tec

SCD 005 / 040 / 050 / 500

Ø54mm

Bal-Tec

MED 10 / MED 20

Ø54mm

Bio-Rad

SC5200 / SC502

Ø57mm
Bio-RadE7400 / LT7400Ø24mm

Cressington

108manual / 108auto

Ø57mm

Cressington

108auto/SE

Ø57mm

Cressington

208HR

Ø57mm

Denton

Desk II / II / IV / V

Ø60mm

Edwards

150B / Scancoat

Ø60mm

Emitech

SC7620 / SC7610

Ø57mm

Emitech on Ø60mm target holder

K500X / K550X /  K650X

Ø60mm

Emitech

K575X &XD / K675X & XD

Ø57mm

Emitech

Q150

Ø57mm

EMS

150R / 150T / 300R / 300R

Ø57mm

EMS

K575X &XD / K675X & XD

Ø57mm

EMS

SC7620 / SC7610

Ø57mm

EMS on Ø60mm target holder

K500X / K550X /  K650X

Ø60mm

Emscope on Ø58mm target holder

SC500 / SC500A

Ø58mm

Emscope

SC502

Ø57mm

Fullam

EffaCoater / EMS-76

Ø50mm

Gatan

681 Ion Beam Coater

Ø19mm

Gatan

682 PECS Ion Beam Coater

Ø19mm

Gatan

685 PECS II Ion Beam Coater

Ø19mm

Hitachi

MC 1000

Ø62mm

HHV

BT150 / BT300

Ø54mm

HoYeon

HC21

Ø57mm

ISI

ISI 5400

Ø57mm

JEOL

JFC-1200 / 1300 / 1400 / 1600

Ø57mm

JEOL

JFC-2300HR

Ø57mm

Leica

EM SCD 005 / 050 / 500

Ø54mm

Leica

EM MED 020

Ø54mm

Leica

ACE 200 / ACE 600

Ø54mm

Pelco

SC4 / SC5 /  SC6  / SC7

Ø57mm

Polaron / Bio-Rad

E5000 / E5200 / E5400 / E5800

Ø57mm

Polaron / Bio-Rad

PS 3

Ø57mm

Polaron / Quorum

SC7620 / SC7610

Ø57mm

Quorum

Q150R / Q150T / SC7620

Ø57mm

Quorum

Q300R / Q300T

Ø57mm
QuorumPP2000 / PP2000TØ24mm
QuorumPP3000T / PP3010TØ24mm
SafematicCCU-010Ø54mm

SEC

MCM-100 / MCM-200

Ø50mm

SPI

SPI-Module

Ø57mm

SPI

SPI Super

Ø50mm
VG Microtech / Fisons / ThermoPP2200 / PP2000TØ24mm